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Surface Temperature During Implantation

Because the PSII process features very large heat fluxes which are applied to the target and base plate over a very short period of time, a specific concern is the peak target surface temperature at the end of the (typically 10 s) pulse. Because of the short duration of this pulse, this situation can be modeled as a semi-infinite, 1-dimensional solid with a uniform surface heat flux. The governing equation then becomes:

where is the distance from the target surface. The boundary condition for this calculation is

where is the applied surface heating, which is assumed to be known, is the heat flux lost as radiation, and is the heat flux lost due to conduction.

Due to the radiation term, this equation is nonlinear and no analytical solution exists except for special cases. We can simplify this equation by eliminating the conduction and radiation terms, thus allowing an analytical solution. This will provide an upper bound for the surface temperature achieved during a single pulse. The boundary condition then becomes

The solution for this problem is [4]

The surface temperature is obtained by setting , giving:

This result is plotted in Figure 3, which shows the surface temperature as a function of the applied heat flux for three different materials: 304 stainless steel, Ti-6Al-4V, and silicon. These results were achieved using the material properties shown in Table 1 and assuming a 20 s pulse width. Note that the material properties used are room-temperature properties. They will vary somewhat with temperature, but this has not been accounted for in this study.

Typical heat fluxes in the PSII chamber at the University of Wisconsin - Madison are on the order of 10 MW/m. As seen in Figure 3, this would produce temperature rises of less than 12 C for each of the materials shown.

To estimate the effect of radiation in this analysis, we can compare the radiative heat flux to the applied heat flux. For a target temperature of 600 C (873 K) and an emissivity of 1.0, the heat flux due to radiation to a body at 0 K would be 0.03 . This is much less than the heat flux during a typical PSII pulse. Furthermore, the effect of radiation would be even smaller for more realistic conditions (lower target temperature, lower emissivity, larger sink temperature). Hence, radiation can be ignored on these time scales (tens of microseconds), and Figure 3 is an accurate representation of the target surface temperatures to be expected during a PSII pulse.



Next: Thermal Gradients Within Up: No Title Previous: Thermal Model


jake@
Thu Jun 2 10:55:42 CDT 1994